| Vorliegende Sprache |
eng |
| Hinweise auf parallele Ausgaben |
494428058 Erscheint auch als (Druck-Ausgabe): ‡Ivanov, Alexey: Silicon anodization as a structuring technique |
| ISBN |
978-3-658-19237-2 |
| Name |
Ivanov, Alexey |
| T I T E L |
Silicon Anodization as a Structuring Technique |
| Zusatz zum Titel |
Literature Review, Modeling and Experiments |
| Verlagsort |
Wiesbaden |
| Verlag |
Springer Vieweg |
| Erscheinungsjahr |
2018 |
| 2018 |
| Umfang |
Online-Ressource (XXIX, 316 p. 141 illus., 3 illus. in color, online resource) |
| Reihe |
SpringerLink. Bücher |
| Titelhinweis |
Erscheint auch als (Druck-Ausgabe): ‡Ivanov, Alexey: Silicon anodization as a structuring technique |
| Printed editionISBN: 978-3-658-19237-2 |
| ISBN |
ISBN 978-3-658-19238-9 |
| Klassifikation |
TDPB |
| TEC027000 |
| 620.5 |
| T174.7 |
| Kurzbeschreibung |
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents Silicon Anodization: State of the Art Experimental, Characterization and Simulation Methods Microscale Study of Anodization Process Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups Researchers and students of microsystems technology, electrochemistry, microengineering Practitioners in the area of microsystems, silicon processing and electrochemical material processing
|
| 2. Kurzbeschreibung |
Silicon Anodization: State of the Art -- Experimental, Characterization and Simulation Methods -- Microscale Study of Anodization Process -- Anodization Process as a Structuring Technique: Experiments and Simulation |
| 1. Schlagwortkette |
Silicium |
| Poröser Stoff |
| Anodische Oxidation <Oberflächenbehandlung> |
| Opferschicht |
| Elektropolieren |
| Elektrochemisches Abtragen |
| Lithografie <Halbleitertechnologie> |
| Maskentechnik |
| Mikrosystemtechnik |
| Finite-Elemente-Methode |
| SWB-Titel-Idn |
494010622 |
| Signatur |
Springer E-Book |
| Bemerkungen |
Elektronischer Volltext - Campuslizenz |
| Elektronische Adresse |
$uhttp://dx.doi.org/10.1007/978-3-658-19238-9 |
| Internetseite / Link |
Volltext |
