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Advanced Mechatronics and MEMS Devices

Kataloginformation Katalogdatensatz500177238 .

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Feldname	Details
Vorliegende Sprache	eng
ISBN	978-1-4419-9984-9
Name	Zhang, Dan
T I T E L	Advanced Mechatronics and MEMS Devices
Verlagsort	New York, NY
Verlag	Springer
Erscheinungsjahr	2013
Erscheinungsjahr	2013
Umfang	Online-Ressource (XI, 249 p. 172 illus, digital)
Reihe	Microsystems ; 23
Notiz / Fußnoten	Description based upon print version of record
Weiterer Inhalt	Advanced Mechatronicsand MEMS Devices; Preface; Contents; Contributors; Chapter 1: Experience from the Development of a Silicon-Based MEMS Six-DOF Force--Torque Sensor; 1.1 Introduction; 1.2 Measurement Concept; 1.3 Design of MEMS Structure; 1.4 Design of Transducer Structure; 1.5 Fabrication of MEMS Chip; 1.6 Mounting of MEMS chip; 1.7 Measurement Electronics; 1.8 Sensor Tests and Calibration; 1.9 Final Demonstrator; 1.10 Conclusions; References; Chapter 2: Piezoelectrically Actuated Robotic End-Effector with Strain Amplification Mechanisms; 2.1 Introduction. 2.2 Nested Rhombus Multilayer Mechanism2.2.1 Exponential Strain Amplification of PZT Actuators; 2.2.2 Prototype Actuator Unit; 2.2.3 Micromanipulator Design; 2.2.4 Modular Design of Cellular Actuators; 2.3 Lumped Parameter Model of Nested Rhombus Strain AmplificationMechanism; 2.3.1 Two-Port Model of Single-Layer Flexible Rhombus Mechanisms; 2.3.2 Lumped Parameter Model; 2.3.3 Muscle-Like Compliance; 2.4 Control of Compliant Actuators by Minimum Switching Discrete Switching Law; 2.5 Tweezer-Style Piezoelectric End-Effector. 2.5.1 Piezoelectric End-Effector for Robotic Surgery and Intervention in MRI2.5.2 Modeling and Design; 2.5.3 Fabrication and Performance Test; 2.5.4 Force Sensing; 2.6 Conclusion; Appendix; Structural Analysis of Tweezer-Style End-Effector; References; Chapter 3: Autocalibration of MEMS Accelerometers; 3.1 Introduction; 3.2 Sensor Models; 3.3 Noise Model; 3.4 Local Gravity Variations; 3.5 Calibration Procedures; 3.5.1 Six-Positions Method; 3.5.2 Extended Six-Positions Method; 3.5.3 Autocalibration Methods; 3.5.4 Other Calibration Methods; 3.6 Results. 3.6.1 Accuracy of the Estimated Sensor Parameters3.6.2 Evaluation of the Accuracy of the Calibrated Sensor Used as a Tilt Sensor; 3.6.3 From the Sensitivity Matrix to the Axes Misalignments; 3.6.4 Calibration of Another Sensor: ADXL330 (Wiimote Accelerometer); 3.7 Conclusion; 3.7.1 Choice of the Sensor Model; 3.7.2 Modeling the Sensor Noise; 3.7.3 The Right Value of g; 3.7.4 Accuracy of the Estimated Parameters; 3.7.5 Axes Misalignments from Calibration Data; References; Chapter 4: Miniaturization of Micromanipulation Tools; 4.1 Introduction; 4.2 Fabrication; 4.2.1 Serial Fabrication. 4.2.2 Batch Fabrication4.3 Applications; 4.3.1 Imaging Platform; 4.3.2 Surface Adhesion; 4.3.2.1 Passive Release; 4.3.2.2 Active Release; 4.3.3 Depth Detection; 4.3.3.1 Depth from Focus; 4.3.3.2 Touch Sensing; 4.3.3.3 Shadow-Based Detection; 4.3.3.4 Stereoscopic SEM Imaging; 4.3.3.5 Sliding-Based Detection; 4.4 Conclusion; References; Chapter 5: Digital Microrobotics Using MEMS Technology; 5.1 Introduction; 5.2 Fundamentals of Digital Microrobotics; 5.2.1 Mechanical Bistable Module; 5.2.2 Robot Axes Based on Bistable Modules; 5.2.3 Digital Microrobots. 5.2.4 Comparison Between Current Microrobots and Digital Microrobots
Titelhinweis	Buchausg. u.d.T.ISBN: 978-1-441-99984-9
ISBN	ISBN 978-1-4419-9985-6
Klassifikation	TDPB
	TEC027000
	620.5
	T174.7
Kurzbeschreibung	Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few.
SWB-Titel-Idn	37350005X
Signatur	Springer E-Book
Bemerkungen	Elektronischer Volltext - Campuslizenz
Elektronische Adresse	$uhttp://dx.doi.org/10.1007/978-1-4419-9985-6
Internetseite / Link	Volltext
Siehe auch	Volltext
Siehe auch	Cover

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